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05/04/2023
Impact Study of Numerical Discretization Accuracy on Parameter Reconstructions and Model Parameter Distributions
Numerical models are used widely for parameter reconstructions in the fi...
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02/23/2022
Bayesian Target-Vector Optimization for Efficient Parameter Reconstruction
Parameter reconstructions are indispensable in metrology. Here, on wants...
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07/12/2021
Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology
Parameter reconstruction is a common problem in optical nano metrology. ...
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01/08/2021
Bayesian optimization with improved scalability and derivative information for efficient design of nanophotonic structures
We propose the combination of forward shape derivatives and the use of a...
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03/28/2019
Using Gaussian process regression for efficient parameter reconstruction
Optical scatterometry is a method to measure the size and shape of perio...
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09/18/2018
